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article
The atomic and electron structure of ZrO2
Abstract
The atomic structure of amorphous and crystalline zirconium dioxide (ZrO<sub>2</sub>) films is studied using X-ray diffraction and extended X-ray absorption fine structure techniques. The electron structure of ZrO<sub>2</sub> is experimentally determined using X-ray and UV photoelectron spectroscopy, and the electron energy band structure is theoretically calculated using electron density functional method. According to these data, the valence band of ZrO <sub>2</sub> consists of three subbands separated by an ionic gap. The upper subband is formed by the O2p states and Zr4d states; the medium subband is formed by the O2s states; and the narrow lower subband is formed predominantly by the Zr4p states. The bandgap width in amorphous ZrO<sub>2</sub>, as determined using the electron energy loss spectroscopy data, amounts to 4.7 eV. The electron band structure calculations performed for a cubic ZrO<sub>2</sub> phase point to the existence of both light (0.3m <sub>0</sub>) and heavy (3.5m <sub>0</sub>) holes, where m <sub>0</sub> is the free electron mass. The effective masses of band electrons in ZrO<sub>2</sub> fall within (0.6-2.0)m <sub>0</sub>. © Pleiades Publishing, Inc., 2006.