• Kantor, Innokenty
• Bae, Garam
• Wallentin, Jesper
• Stamate, Eugen
• Han, Jin Kyu
• Hansen, Thomas Willum
• Bruus, Henrik
• Esposito, Vincenzo
• Chen, Huaiyu
• Florio, Daniel Zanetti De
• Frederiksen, Valdemar
• Andersen, Anton Bay
• Tinti, Victor Buratto
• Song, Wooseok

Abstract

<div>Electromechanical metal oxides, such aspiezoceramics, are often incompatible with soft polymers due to theircrystallinity requirements, leading to high processing temperatures.This study explores the potential of ceria-based thin films aselectromechanical actuators for flexible electronics. Oxygen-deficientfluorites, like cerium oxide, are centrosymmetric nonpiezoelectriccrystalline metal oxides that demonstrate giant electrostriction. Thesefilms, deposited at low temperatures, integrate seamlessly with varioussoft substrates like polyimide and PET. Ceria thin films exhibitremarkable electrostriction (<i>M</i>₃₃ &gt; 10⁻¹⁶ m² V⁻²) and inverse pseudo-piezo coefficients (<i>e</i>₃₃ &gt; 500 pmV⁻¹),enabling large displacements in soft electromechanical systems. Ourstudy explores resonant and off-resonant configurations in thelow-frequency regime (&lt;1 kHz), demonstrating versatility forthree-dimensional and transparent electronics. This work advances theunderstanding of oxygen-defective metal oxide electromechanicalproperties and paves the way for developing versatile and efficientelectromechanical systems for applications in biomedical devices,optical devices, and beyond.</div>

Topics

• polymer
• thin film
• Oxygen
• Cerium