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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Eich, Manfred
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (26/26 displayed)
- 2024On the applicability of the Maxwell Garnett effective medium model to media with a high density of cylindrical porescitations
- 2024Demystifying the semiconductor-to-metal transition in amorphous Vanadium pentoxide: the role of substrate/thin film interfaces
- 2024Demystifying the Semiconductor-to-Metal Transition in Amorphous Vanadium Pentoxidecitations
- 2024Demystifying the Semiconductor‐to‐Metal Transition in Amorphous Vanadium Pentoxide: The Role of Substrate/Thin Film Interfaces
- 2024Demystifying the Semiconductor-to-Metal Transition in Amorphous Vanadium Pentoxide:The Role of Substrate/Thin Film Interfacescitations
- 2023Chemical interface damping by electrochemical oxidation of gold
- 2022Nanoporous gold as an active plasmonic metamaterial
- 2021Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition
- 2019Advancing the fabrication of YSZ-inverse photonic glasses for broadband omnidirectional reflector films
- 2018Photonic glass for high contrast structural color
- 2018Photonic glass for high contrast structural color
- 2018Photonic materials for high-temperature applications: synthesis and characterization by X-ray ptychographic tomography
- 2015Enhanced structural and phase stability of titania inverse opalscitations
- 2015Mechanism that governs the electro-optic response of second-order nonlinear polymers on silicon substratescitations
- 2015Yttria-stabilized zirconia microspheres: Novel building blocks for high-temperature photonics
- 2014Modification of a Teng-Man technique to measure both r33 and r13 electro-optic coefficientscitations
- 2014Electrical and electro-optic characterization of nonlinear polymer thin films on silicon substrate
- 2013Fabrication of high Q-cavities with functional polymer cladding
- 2013High Q silicon photonic crystal cavities for functional cladding materials
- 2013Configurable silicon photonic crystal waveguidescitations
- 2013Configurable silicon photonics with electron beam bleaching
- 2012Trimming of high-Q-factor silicon ring resonators by electron beam bleachingcitations
- 2012Photonic crystal cavity definition by electron beam bleaching of chromophore doped polymer claddingcitations
- 2012Four wave mixing in silicon hybrid and silicon heterogeneous micro photonic structurescitations
- 2010Hybrid silicon-organic racetrack resonator designs for electro-optical modulationcitations
- 2009Electro-optical modulator in a polymer-infiltrated silicon slotted photonic crystal waveguide heterostructure resonator
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document
Photonic crystal cavity definition by electron beam bleaching of chromophore doped polymer cladding
Abstract
We demonstrate a novel concept for the fabrication of high Q photonic crystal heterostructure cavities. First, photonic crystal waveguides without cavities are fabricated. The cavities are defined in a later fabrication step by spatially resolved bleaching of a chromophore doped polymer cladding. Bleaching of polymer films either by UV light or by electron beam illumination is well known to reduce the refractive index of the film. The reduction of the cladding refractive index leads to a reduction of the effective lattice constant of the photonic crystal waveguide. The maximum refractive index change was found to be 6·10 <sup>-2</sup> which corresponds to the effective lattice constant change of 12.2 nm. With this approach it is also possible to achieve very small effective lattice constant shifts of 0.02 nm which is not possible with state of the art lithography. Being able to precisely define the effective lattice constant at every point of the photonic crystal waveguide we are able to impose cavity mode profiles which closely resemble a Gaussian envelope. This leads to a dramatic increase of the Q-factor. In simulations we have obtained Q-factors as high as 3.0·106 for a vertically symmetric polymer cladding. First results for non-vertically symmetric structures are presented. © 2012 SPIE.