• Kalmes, Pamela
• Veith, Michael
• Becker-Willinger, Carsten
• Herbeck-Engel, Petra

Abstract

A new type of cationically polymerizable organic-inorganic hybrid nanocomposite with micro-patternability and tailorable thermomechanical properties has been developed[1]. The material has been built by co-condensation of 3-glycidyloxypropyl-triethoxysilane and phenyltriethoxysilane followed by subsequent mixing with oligomericcycloaliphatic epoxy resin as organic co-monomer. Nanocomposite mixtures have been formed by dispersing silicananoparticles with 15 nm particle size into the performed matrix sol. To achieve an almost homogeneous distribution ofthe nanoparticles over the matrix different surface modifiers have been applied on the silica surface. The resultingtransparent mixtures have been applied on silicon substrates and have been UV-polymerized using a cationicphotoinitiator. The mechanical and thermomechanical properties as well as the resolution of photo patterns have beenfollowed in dependence of the nanoparticulate filler content and the type of surface modification. Photo patterns could becreated with high edge steepness even for highly filled systems. The universal hardness increased from 145 MPa for theunfilled hybrid resin to 244 MPa for the system containing 30 wt.-% silica. The same nanocomposite system showed anelastic modulus of about 5090 MPa compared to the unfilled hybrid resin of 3380 MPa which indicates the high potentialof these materials forming mechanically stable patterns.

Topics

• nanoparticle
• nanocomposite
• surface
• hardness
• Silicon
• forming
• resin