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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Spiga, Daniele
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2022ATHENA optics technology developmentcitations
- 2014Evaluation of the surface strength of glass plates shaped by hot slumping processcitations
- 2013Accurate integration of segmented x-ray optics using interfacing ribscitations
- 2010The optics system of the New Hard X-ray Mission: design and developmentcitations
- 2009Design and development of the optics system for the NHXM Hard X-ray and Polarimetric Missioncitations
- 2009Enabling deposition of hard x-ray reflective coatings as an industrial manufacturing processcitations
- 2005Characterization of a W/Si graded multilayer coated mirror shell (n. 326) preformed by Nickel electroforming (april 2004)
- 2004Hard X-ray multilayer coated astronomical mirrors by e-beam depositioncitations
- 2003The HEXIT (High Energy X-ray Imaging Telescope) balloon-borne mission
Places of action
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article
Enabling deposition of hard x-ray reflective coatings as an industrial manufacturing process
Abstract
Depth-graded multilayer structures are widely considered as the preferred technology for the next generation of hard Xray telescopes operating in the spectral range up to several tens of keV. This contrasts to earlier generation telescopes which operated in the 1-10 keV range, and utilized single material reflection layers (e.g. Au). Several future space missions are scheduled to include optics comprising up to hundreds of nested shells with Wolter-I profile. Therefore, the need for an industrial strength (in terms of robustness, reliability and precision) manufacturing process for such multilayers has emerged. In this paper, we will discuss the enabling technologies towards "industrial" Physical Vapor Deposition (PVD) technology we have developed for this precision coating process. More specifically, we will review the results obtained on periodic and a-periodic W/Si multilayers, which have been produced on shells of 600 mm height and 300 mm diameter. Points that will be discussed include: Â. Advanced process control based on in-situ sensors and its effect on repeatability and stability of the process. Â. Ex-situ metrology methods Â. Thickness homogeneity over large areas