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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Garoli, Denis
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2024Tailored fabrication of 3d nanopores made of dielectric oxides for multiple nanoscale applications
- 2024Porous aluminum decorated with rhodium nanoparticles : preparation and use as a platform for UV SERScitations
- 2024Dry synthesis of bi-layer nanoporous metal films as plasmonic metamaterialcitations
- 2024Light-matter interactions in layered materials and heterostructures:from moiré physics and magneto-optical effects to ultrafast dynamics and hybrid meta-photonics
- 2020Galvanic replacement reaction as a route to prepare nanoporous aluminum for UV plasmonicscitations
- 2017Nanoporous gold decorated with silver nanoparticles as large area efficient SERS substratecitations
- 2012Optical and structural properties of low thickness lead zirconate titanate films on sapphire substrates prepared via sol-gel methodcitations
- 2012Wedge nanostructures for plasmonic nanofocusingcitations
- 2011Spectroscopic study of β-SiC prepared via PLD at 1064 nmcitations
- 2009Enabling deposition of hard x-ray reflective coatings as an industrial manufacturing processcitations
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article
Enabling deposition of hard x-ray reflective coatings as an industrial manufacturing process
Abstract
Depth-graded multilayer structures are widely considered as the preferred technology for the next generation of hard Xray telescopes operating in the spectral range up to several tens of keV. This contrasts to earlier generation telescopes which operated in the 1-10 keV range, and utilized single material reflection layers (e.g. Au). Several future space missions are scheduled to include optics comprising up to hundreds of nested shells with Wolter-I profile. Therefore, the need for an industrial strength (in terms of robustness, reliability and precision) manufacturing process for such multilayers has emerged. In this paper, we will discuss the enabling technologies towards "industrial" Physical Vapor Deposition (PVD) technology we have developed for this precision coating process. More specifically, we will review the results obtained on periodic and a-periodic W/Si multilayers, which have been produced on shells of 600 mm height and 300 mm diameter. Points that will be discussed include: Â. Advanced process control based on in-situ sensors and its effect on repeatability and stability of the process. Â. Ex-situ metrology methods Â. Thickness homogeneity over large areas