• Miyazaki, Satoshi
• Kamata, Yukiko
• Nakaya, Hidehiko
• Tsuru, Takeshi G.
• Suzuki, Hisanori
• Muramatsu, Masaharu
• Miyata, Emi
• Tsunemi, Hiroshi
• Miyaguchi, Kazuhisa

Abstract

In order to improve the quantum efficiency (QE) at longer wavelength, we have developed fully-depleted backilluminated CCDs in collaboration with Hamamatsu Photonics K.K (HPK). Recently, HPK delivered 10 CCDs for Subaru Prime Focus Camera (Suprime-Cam). These CCDs are made on N-type, high resistivity silicon wafers. Each CCD has a 200 μm thick depletion layer. The CCD format is four-side buttable, 2k × 4k, 15 μm square pixels with 4 low noise output amplifiers. The characteristics of the CCDs have been tested in the laboratory before they are installed into Suprime-Cam dewar. These CCDs have excellent performance; readout noise &lt; 5 e<SUP>-</SUP>, dark current &lt; 2 e<SUP>-</SUP>/hour/pixel, parallel and serial charge transfer efficiency (CTE) &gt; 0.999995, and full-well ~ 180,000 e<SUP>-</SUP>. The QE of λ = 1 μm was 40 % at -100°C. All CCDs have good cosmetics. Surface flatness is ~ 25 μm peak to value (P-V). The specification was acceptable. We are also developing CCDs for Hype Suprime-Cam (HSC), the next generation instrument for Subaru Telescope. HPK optimized back side process and has developed blue enhanced CCDs for HSC....

Topics

• impedance spectroscopy
• surface
• resistivity
• Silicon