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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Basso, S.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2019Glass-made adjustable integration mold for x-ray optics: experimental feasibility campaign
- 2018A novel approach for the realization of thin glass substrates for optical mirrorscitations
- 2017Design and development of the multilayer optics for the new hard x-ray missioncitations
- 2015Cold shaping of thin glass foils: a fast and cost-effective solution for making light-weight astronomical x-ray opticscitations
- 2014Integrated modeling for parametric evaluation of smart x-ray opticscitations
- 2011Technologies for manufacturing of high angular resolution multilayer coated optics for the New Hard X-ray Missioncitations
- 2010Technologies for manufacturing of high angular resolution multilayer coated optics for the New Hard X-ray Mission: a status report IIcitations
- 2008Slumped glass option for making the XEUS mirrors: preliminary design and ongoing developmentscitations
- 2007Characterization of hydrogenated silicon carbide produced by plasma enhanced chemical vapor deposition at low temperature
- 2007Development of lightweight optical segments for adaptive opticscitations
Places of action
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document
Characterization of hydrogenated silicon carbide produced by plasma enhanced chemical vapor deposition at low temperature
Abstract
A new technology has been developed to grow layers of amorphous hydrogenated Silicon Carbide in vacuum, at temperatures below 100-120°C by Physical Enhanced Chemical Vapour Deposition (PE-CVD) technology. The layers have been used either to improve the surface quality of SiC mirror substrates (produced by methods different of the CVD approach, like e.g. sintered SiC) as a super-polishable cladding coatings, or to form self-sustaining thin mirrors in SiC. It should be noted that the PE-CVD claddings can be applied also to substrates different than SiC, as e.g. metals like Al or Kanigen, in order to create a high durability polishable external layer. It this paper we present the results of a wide characterization of the new material, considering the mechanical, structural and optical properties that are the most indicative parameters for its application in optics, with particular reference to the production of mirrors for ground and space astronomical applications....