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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Wood, David
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2021Fragmentation studies by non-explosive cylinder expansion techniquecitations
- 2020Fragmentation studies by non-explosive cylinder expansion techniquecitations
- 2020Ricochet quantification using a multiple sensor approachcitations
- 2019The dynamic response of dense 3 dimensionally printed polylactic acidcitations
- 2018Bioinspired nanoparticle spray-coating for superhydrophobic flexible materials with oil/water separation capabilitiescitations
- 2016Stem Migration and Fretting Corrosion of the Antirotation Pin in the K2/Apex Hip Systemcitations
- 2015A New Si/TiO2/Pt p-n Junction Semiconductor to Demonstrate Photoelectrochemical CO2 Conversioncitations
- 2014Failure of a low rail system in a curved railway track subject to long term rail-wheel interactive wear
- 2013Fatigue testing of defected steel beams repaired using medium and high modulus CFRP strand sheets
- 2007The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machiningcitations
- 2003A current review on the biology and treatment of articular cartilage defects (part I & part II)
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article
The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining
Abstract
The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.