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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Maropoulos, Paul G.
Aston University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2011Guest editorialcitations
- 2009Empirical expression of tool wear when face milling 416 SS
- 2009Empirical expression of tool wear when face milling 416 SS
- 2009Influence of cutting parameters and tool wear on martensitic stainless steel surface integrity after a face milling processcitations
- 2009Influence of cutting parameters and tool wear on martensitic stainless steel surface integrity after a face milling processcitations
- 2007The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machiningcitations
- 2006A theoretical framework for the integration of resource aware planning with logistics for the dynamic validation of aggregate plans within a production networkcitations
- 2000A flexible tool selection decision support system for milling operationscitations
Places of action
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article
The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining
Abstract
The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.