| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Sabac, Andrei
in Cooperation with on an Cooperation-Score of 37%
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Publications (7/7 displayed)
- 2022A membrane-less Glucose/O2 non-enzymatic fuel cell based on bimetallic Pd–Au nanostructure anode and air-breathing cathode: Towards micro-power applications at neutral pHcitations
- 2022Cedar Wood-Based Biochar: Properties, Characterization, and Applications as Anodes in Microbial Fuel Cellcitations
- 2017Minimally invasive microelectrode biosensors reveal different neurochemical signature of spreading depolarization in rat cortex.
- 2017Platinized Carbon Fibers as an Electrochemical Substrate to Obtain Minimally Invasive Microelectrode Biosensors for Brain Monitoring
- 2005Nanostructuring lithium niobate substrates by focused ion beam millingcitations
- 2004Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin filmscitations
- 2004Optomechanical characterisation of compressively prestressed silicon oxynitride films deposited by plasma-enhanced chemical vapour deposition on silicon membranescitations
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document
Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films
Abstract
A very broad field of relevant technologies and testing methods for silicon micromechanical elements had to be limited to specific elements and adapted methodologies including experimental and numerical methods. In particular, the bimorph micromembranes under buckling are key elements for investigations of their mechanical properties. Due to optical quality of silicon-based layers deposited on micromechanical devices under consideration, the two-beam interferometry with computer interferogram processing is well adapted for shape and deformation measuring, while the nanoindentation is able to extract the hardness as well as the Young"s modulus. In this contribution, we investigate the silicon square membranes prestressed by deposition of silicon oxinitride (SiOxNy) films fabricated by PECVD. The combination of experimental techniques with fine elements method (FEM) proposed here offers a powerful tools for investigation of residual stress of SiOxNy layers. The distribution of residual stress is monitored as a function of the refractive index of SiOxNy films, establishing the correlation between the optical and micromechanical properties of deposited thin films.