| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Kujawińska, Małgorzata
Warsaw University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2019Polymer optical bridges for efficient splicing of optical fiberscitations
- 2018Characterization of 3D phantom for holographic tomography produced by two-photon polymerization
- 2018Polymer optical bridges for efficient splicing of optical fiberscitations
- 2017Investigations of high power laser beam interaction with composite materials by means of digital image correlation and thermographycitations
- 2017Revealing features of different optical shaping technologies by a point diffraction interferometercitations
- 2016The polymer converter for effectively connecting polymer with silica optical fibrescitations
- 2015Experimental investigation of displacement/strain fields in metal coatings deposited on ceramic substrates by thermal sprayingcitations
- 2015Polymer Microtips at Different Types of Optical Fibers as Functional Elements for Sensing Applicationscitations
- 2015Badania naprężeń własnych w powłokach metalowych natryskiwanych na podłoże ceramiki Al2O3
- 2014New concept of technology chain for 3D/4D content generation and display
- 2013Polymer microtips fabricated at the extermity of different type optical fibers
- 2011Experimental comparative testing of steel structures by strain gauges, Digital Image Correlation and magnetic field methods
- 2007The studies of the illumination/detection module in Integrated Microinterferometric Extensometer
- 2004Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin filmscitations
- 2001Long base optical extensometer for tensile testing machines
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document
Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films
Abstract
A very broad field of relevant technologies and testing methods for silicon micromechanical elements had to be limited to specific elements and adapted methodologies including experimental and numerical methods. In particular, the bimorph micromembranes under buckling are key elements for investigations of their mechanical properties. Due to optical quality of silicon-based layers deposited on micromechanical devices under consideration, the two-beam interferometry with computer interferogram processing is well adapted for shape and deformation measuring, while the nanoindentation is able to extract the hardness as well as the Young"s modulus. In this contribution, we investigate the silicon square membranes prestressed by deposition of silicon oxinitride (SiOxNy) films fabricated by PECVD. The combination of experimental techniques with fine elements method (FEM) proposed here offers a powerful tools for investigation of residual stress of SiOxNy layers. The distribution of residual stress is monitored as a function of the refractive index of SiOxNy films, establishing the correlation between the optical and micromechanical properties of deposited thin films.