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document
Sol-gel hybrid channel waveguide fabrication using UV excimer laser patterning
Abstract
Definition of channel waveguides on hybrid sol-gel material was demonstrated using a 248 nm UV excimer laser. without mixing organic photoinitiators in the solution preparation step. Thin films fabricated by hydrolysis and polycondensation of methacryloxypropyltrimethoxysilane (MAPTMS) doped with zirconium oxide were deposited by spin-coating on soda-lime glass substrates (n=1.514). Channel waveguides were defined by microlithography and then covered by a protective layer composed of a combination of MAPTMS and tetramethoxysilane (TMOS). Finally, after cutting and polishing, the waveguides were optically characterised.