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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Christensen, Finn Erland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2023Investigation of NiV-based multilayers for the High Energy X-ray Probecitations
- 2022ATHENA optics technology developmentcitations
- 2021The Athena x-ray optics development and accommodationcitations
- 2021The effect of deposition process parameters on thin film coatings for the Athena X-ray opticscitations
- 2013Hard X-ray/soft gamma-ray telescope designs for future astrophysics missionscitations
- 2013X-ray optics for axion helioscopescitations
- 2003Thermal forming of glass microsheets for x-ray telescope mirror segments
- 2000Growth, structure, and performance of depth-graded W/Si multilayers for hard x-ray opticscitations
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document
The effect of deposition process parameters on thin film coatings for the Athena X-ray optics
Abstract
<p>The thin film coating technology for the European Space Agency mission, Advanced Telescope for High-Energy Astrophysics (Athena) has been established. The X-ray optics of the Athena telescope is based on Silicon Pore Optics (SPO) technology which is enhanced by the thin film coatings deposited on the reflective surface of the SPO plates. In this work, we present a literature study of the coating process parameter space and provide an overview of the thin film properties with a focus on micro roughness, chemical composition and wear resistance when deposited under various process conditions. We determined, that the thin film density depends strongly on the mobility of the adatoms on the substrate surface. Some coating process parameters, which have a significant impact on the adatom mobility are the discharge voltage, the working gas pressure and the substrate temperature.</p>