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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Rashidi, Amin
Imec the Netherlands
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Publications (5/5 displayed)
- 2023A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTscitations
- 2023An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implantscitations
- 2021S-MRUTcitations
- 2020Realization of high efficiency ultrasound-powered micro-LEDs for optogeneticscitations
- 2019Multi-Ring Ultrasonic Transducer on a Single Piezoelectric Disk For Powering Biomedical Implantscitations
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document
Realization of high efficiency ultrasound-powered micro-LEDs for optogenetics
Abstract
<p>We present the fabrication, characterization, and demonstration of high-efficiency ultrasound-powered microlight emitting diodes (µLED) for use in optogenetic applications. InGaN based blue-emitting LED material wafers grown on a patterned sapphire substrate (PSS) were used to assist in the out-scattering of the light. The turn-on voltage of the LEDs is around 2.5 volts and the electrical ideality factor is 1.2 confirming high radiative recombination efficiency. A power density of more than 50 mW/mm<sup>2</sup> was obtained from a 130 × 300 µm<sup>2</sup> LED with a mesa of 100 µm diameter at 3 mA which is much more than is required to excite channelrhodopsin transfected neural cells. A high external quantum efficiency (EQE) of 33% is obtained at 3 mA measured in an integrating sphere. The peak wavelength of the µLED was measured at 483 nm at different current densities. The µLEDs are integrated directly onto a rectifier and Piezoelectric Transducer (PZT) harvester to realise a highly efficient ultrasound-powered light delivery unit capable to generate mWs of optical power. The concept was validated by powering the integrated device with ultrasound.</p>