| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Trusiak, Maciej
Warsaw University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2017Revealing features of different optical shaping technologies by a point diffraction interferometercitations
- 2016Subtractive two-frame three-beam phase-stepping interferometry for testing surface shape of quasi-parallel plates citations
- 2014Optical metrology with Hilbert-Huang fringe pattern analysis for experimental mechanics
- 2013Highly contrasted Bessel fringe minima visualization for time-averaged vibration profilometry using Hilbert transform two-frame processingcitations
Places of action
| Organizations | Location | People |
|---|
document
Revealing features of different optical shaping technologies by a point diffraction interferometer
Abstract
Almost hidden residual defects of a test surface can be revealed using high precision instrument such as a point diffraction interferometer (PDI). In general, PDI is engaged to display the figure of a surface or wavefront with subnanometer accuracy paying attention to low-frequency configurations. Such technique is suited to test EUV or X-ray optics. The tool described in the paper is able to map absolute profile deviations of several angstroms and therefore it provides a new vision of a surface under test of various quality, e.g. detects specific characteristics which immediately disclose either lapping or diamond turning has been used to form the substrate. Such inspection may help optimize the processes in early stage of shape forming before final configuring.