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| Naji, M. |
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| Motta, Antonella |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Kočí, Jan | Prague |
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| Azam, Siraj |
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| Ali, M. A. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Czerwosz, Elżbieta
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Publications (5/5 displayed)
- 2020Hydrogen sensor based on field effect transistor with C-Pd layercitations
- 2017SEM and Raman studies of CNT films on porous Sicitations
- 2015Influence of Substrate Type on Structure of C-Pd Thin Filmscitations
- 2014Infiuence of Hydrogen on the Properties of Nanostructured C-Pd Films for Sensing Applicationscitations
- 2013Annealing time effects on the surface morphology of C–Pd films prepared on silicon covered with SiO2
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booksection
Influence of Substrate Type on Structure of C-Pd Thin Films
Abstract
C-Pd films were obtained by a two steps’ PVD/CVD method (Physical Vapor Deposition/Chemical Vapor Deposition). Investigations of Pd nanograins structure and carbon matrix structure were performed. Many types of substrates (Si, Si covered with DLC layer, Al2O3 plate and AAO membrane) with various developing specific surface area (SSA) were applied and the influence on this surface on obtained films C-Pd was studied. We present the results of Scanning Electron Microscopy (SEM) studies with SE (Secondary Electrons) and LABE (Low Angle Backscattered Electrons) modes. Depending on the substrate type it was possible to obtain many different films and structures with various structural features. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.