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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Patorski, Krzysztof
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2016Surface flatness measurement of quasi-parallel plates employing three-beam interference with strong reference beam
- 2016Subtractive two-frame three-beam phase-stepping interferometry for testing surface shape of quasi-parallel plates citations
- 2015Three-beam interferogram analysis method for surface flatness testing of glass plates and wedgescitations
- 2014Evaluation of optical parameters of quasi-parallel plates with single-frame interferogram analysis methods and eliminating the influence of camera parasitic fringescitations
- 2014Optical metrology with Hilbert-Huang fringe pattern analysis for experimental mechanics
- 2013Highly contrasted Bessel fringe minima visualization for time-averaged vibration profilometry using Hilbert transform two-frame processingcitations
- 2012Continuous wavelet transform for d-space distribution analysis in nanocrystallic materialscitations
- 2008Quasi-parallel glass plate measurements using Fizeau interferometercitations
- 2007Derivation of quasi-parallel glass plate parameters tested in a Fizeau interferometercitations
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document
Three-beam interferogram analysis method for surface flatness testing of glass plates and wedges
Abstract
When testing transparent plates with high quality flat surfaces and a small angle between them the three-beam interference phenomenon is observed. Since the reference beam and the object beams reflected from both the front and back surface of a sample are detected, the recorded intensity distribution may be regarded as a sum of three fringe patterns. Images of that type cannot be succesfully analyzed with standard interferogram analysis methods. They contain, however, useful information on the tested plate surface flatness and its optical thickness variations. Several methods were elaborated to decode the plate parameters. Our technique represents a competitive solution which allows for retrieval of phase components of the three-beam interferogram. It requires recording two images: a three-beam interferogram and the two-beam one with the reference beam blocked. Mutually subtracting these images leads to the intensity distribution which, under some assumptions, provides access to the two component fringe sets which encode surfaces flatness. At various stages of processing we take advantage of nonlinear operations as well as single-frame interferogram analysis methods. Two-dimensional continuous wavelet transform (2D CWT) is used to separate a particular fringe family from the overall interferogram intensity distribution as well as to estimate the phase distribution from a pattern. We distinguish two processing paths depending on the relative density of fringe sets which is connected with geometry of a sample and optical setup. The proposed method is tested on simulated data.