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Publications (8/8 displayed)
- 2016Tapered optical fiber tip probes based on focused ion beam-milled Fabry-Perot microcavitiescitations
- 2015A fiber optic buckle transducer for measurement of in vitro tendon straincitations
- 2014Post-processing fibers for sensing applications
- 2014Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applicationscitations
- 2014Optical Fiber Fabry-Perot Sensor Fabrication based on Focused Ion Beam Post-Processing
- 2008TEMPERATURE SENSOR USING Hi-Bi ERBIUM-DOPED FIBER LOOP MIRRORcitations
- 2005Bottom electrode crystallization of Pb(Zr, Ti)O-3 thin films made by RF magnetron sputteringcitations
- 2004Bottom electrode crystallization method for heat treatments on thin filmscitations
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document
Optical Fiber Fabry-Perot Sensor Fabrication based on Focused Ion Beam Post-Processing
Abstract
A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Perot cavities in microwires. Both simple cavities and cantilevers are created on 15 mu m-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz - 40 kHz.