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Ee, Renz J. Van
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Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material
Abstract
This paper describes experimental measurement results forphotonic crystal sensor devices which have beenfunctionalized for gas sensing applications. The sensorconsists of a two dimensional photonic crystal etchedinto a slab waveguide having a refractive index of1.7-1.9. Test devices were fabricated from SiON materialon silicon/ silicon dioxide platform, and also in polymermaterials on silicon platform. The inorganic photoniccrystals were made using direct write electron-beamlithography and reactive ion etching. The polymericdevices were made by nano-imprint lithography using theSiON structure as the imprint master. The high refractiveindex polymer was composed of a TiO 2- UV resinnanocomposite having a nanoparticle fraction between 50and 60 wt%. This resulted in a tunable refractive indexbetween 1.7 and 1.85. Devices were functionalized for gassensing applications by coating the surface with achemical receptor. This responsive layer reacts with thetarget gas and changes its refractive index. This changecauses the angle of out-coupling to change slightly. Inthis paper we report successful detection of formaldehydein air at sub ppm levels, and discuss details of chemicalfunctionalization of the PC sensor.