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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Karioja, Pentti
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (17/17 displayed)
- 2022Development of gradient index microlenses for the broadband infrared rangecitations
- 2014Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer materialcitations
- 2014Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer materialcitations
- 2012Printed hybrid systemscitations
- 2011UV-imprinting of single-mode polymeric waveguidescitations
- 2011Manipulation of optical field distribution in layered composite polymeric-inorganic waveguidescitations
- 2011Field enhancement in polymer waveguides fabricated by UV imprintingcitations
- 2010Fabrication of optical inverted-rib waveguides using UV-imprintingcitations
- 2009Hermetic fiber pigtailed laser module utilizing passive device alignment on an LTCC substratecitations
- 2009Finland-Japan Workshop on Nanophotonics and Related Technologies
- 2008Electro-optical properties of BaTiO3-SrTiO3 multilayer thin films for waveguide modulatorscitations
- 2008Electro-optical properties of BaTiO 3 -SrTiO 3 multilayer thin films for waveguide modulatorscitations
- 2007Inmould integration of a microscope add-on system to a 1.3 Mpix camera phonecitations
- 2006Fiber pigtailed multimode laser module based on passive device alignment on an LTCC substratecitations
- 2006Integrated LTCC modules by laminating and co-firing tapes directly on heat sinkcitations
- 2006Cost-efficient hermetic fibre pigtailed laser module utilizing passive device alignment on an LTCC substrate
- 2004Photo-crosslinkable hybrid material with improved aging stability for integrated optics
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document
Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material
Abstract
This paper describes experimental measurement results forphotonic crystal sensor devices which have beenfunctionalized for gas sensing applications. The sensorconsists of a two dimensional photonic crystal etchedinto a slab waveguide having a refractive index of1.7-1.9. Test devices were fabricated from SiON materialon silicon/ silicon dioxide platform, and also in polymermaterials on silicon platform. The inorganic photoniccrystals were made using direct write electron-beamlithography and reactive ion etching. The polymericdevices were made by nano-imprint lithography using theSiON structure as the imprint master. The high refractiveindex polymer was composed of a TiO 2- UV resinnanocomposite having a nanoparticle fraction between 50and 60 wt%. This resulted in a tunable refractive indexbetween 1.7 and 1.85. Devices were functionalized for gassensing applications by coating the surface with achemical receptor. This responsive layer reacts with thetarget gas and changes its refractive index. This changecauses the angle of out-coupling to change slightly. Inthis paper we report successful detection of formaldehydein air at sub ppm levels, and discuss details of chemicalfunctionalization of the PC sensor.