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Norwood, Robert A.
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Publications (5/5 displayed)
- 2016High Refractive Index Copolymers with Improved Thermomechanical Properties via the Inverse Vulcanization of Sulfur and 1,3,5-Triisopropenylbenzenecitations
- 2014Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearitiescitations
- 2010Mach-Zehnder interferometry method for decoupling electro-optic and piezoelectric effects in poled polymer filmscitations
- 2010Mach-Zehnder interferometry method for decoupling electro-optic and piezoelectric tensor components in poled polymer filmscitations
- 2005Organic/Inorganic Hybrid Sol-Gels as Cladding Materials for Electro-Optic Polymer Based Devices
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Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities
Abstract
<p>We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO<sub>2</sub>) and zinc oxide (ZnO) with intermediate Al<sub>2</sub>O<sub>3</sub> layers to limit the crystal size. The waveguide losses of TiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al <sub>2</sub>O<sub>3</sub> nanolaminates can be enhanced by nanoscale engineering of the thin film structure.</p>