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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Mittal, Vinita
University of Southampton
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2020Laser-driven phase segregation and tailoring of compositionally graded microstructures in Si-Ge nanoscale thin filmscitations
- 2020Laser processed semiconductors for integrated photonic devices
- 2020Laser-written silicon-germanium alloy microstructures with tunable compositionally graded profiles
- 2019Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
- 2018Chalcogenide glass waveguides with paper-based fluidics for mid-infrared absorption spectroscopycitations
- 2017Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applicationscitations
- 2014High-contrast, GeTe 4 waveguides for mid-infrared biomedical sensing applicationscitations
- 2014High-contrast, GeTe4 waveguides for mid-infrared biomedical sensing applicationscitations
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document
High-contrast, GeTe4 waveguides for mid-infrared biomedical sensing applications
Abstract
The ideal molecular "fingerprint" region for biochemical analysis is dominated by the Mid-IR spectral region from 2µm to 13µm. Realisation of single mode waveguides optimised for evanescent field based sensing is essential to detect analytes of very low concentration using their fingerprint molecular vibrations. Since commonly used silicate glasses do not transmit at wavelengths beyond 3µm and some Mid-IR transmitting glasses such as the fluorides degrade when in contact with water, novel materials are required to cover this range. Germanium telluride is a promising material which has a broad IR transparency in the region of 2µm - 20µm. We demonstrate a "high contrast" (Δn ~ 1), GeTe<sub>4</sub> single mode rib waveguide on ZnSe. GeTe<sub>4</sub> thin films were deposited on ZnSe substrates by RF sputtering at room temperature. Deposition parameters such as sputtering pressure, power, and argon flow rate were varied to optimise the deposition conditions and to study their effect on the resulting films. The deposited films were amorphous as confirmed by XRD and the average roughness of the films was between 4 and 11nm as measured by AFM. The films transmitted over the full spectral range from 2µm - 20µm as measured by FTIR. Photolithography followed by reactive-ion etching was carried out to etch the film to produce a rib waveguide structure with low surface roughness and vertical sidewalls, using an optimised mixture of CHF<sub>3</sub> and O<sub>2</sub>. Further optical characterization of these waveguides including propagation loss and mode profile will be presented.