• Kozacki, Tomasz
• Kostencka, Julianna
• Tomczewski, Sławomir
• Liżewski, Kamil

Abstract

The most suited techniques for quantitative and accurate determination of the phase distribution in a phase photonic microstructures are based on the interferometry, especially the digital holography (DH) in microscopic configuration. However there is well known limitation of the coherent full- field interferometric measurements: the phase difference between the neighboring samples cannot be larger than 2, or objects shape have to generate light that can be collected by used optical system. This limitation might be overcame by use of a well-known technique called low-coherence interferometry (LCI) which allows for absolute shape measurements with a nanometer resolution and does not have 2 limitation of coherent interferometric techniques. In this work a dual channel measurement system for characterization of a high numerical aperture objects is presented. The system combines functionalities of the LCI system based on Twyman-Green configuration and the DHM system based on Mach-Zehnder configuration. The DHM allows to measure sample in transmission while LCI setup provides reflective measurement data and, therefore, provides a more complete tool for topography characterization. The dual channel system extends capabilities of both methods.

Topics

• impedance spectroscopy
• microstructure
• phase
• interferometry