| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Van Erps, Jurgen
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (21/21 displayed)
- 2023VCSEL wavelength tunability using controlled mechanical strain
- 2021Increasing the Microfabrication Performance of Synthetic Hydrogel Precursors through Molecular Designcitations
- 20203D direct laser writing of microstructured optical fiber tapers on single-mode fibers for mode-field conversioncitations
- 2018Ultrathin Poly-DL-Lactic Membranes for Corneal Endothelial Transplantation
- 2018Localized optical- quality doping of graphene on silicon waveguides through a TFSA- containing polymer matrixcitations
- 2016Replication of self-centering optical fiber alignment structures using hot embossingcitations
- 2016Hot-embossing replication of self-centering optical fiber alignment structures prototyped by deep proton writingcitations
- 2016Deep proton writing with 12 MeV protons for rapid prototyping of microstructures in polymethylmethacrylatecitations
- 2016Optofluidic multi-measurement system for the online monitoring of lubricant oilcitations
- 2016Design and prototyping of self-centering optical single-mode fiber alignment structurescitations
- 2015Mould insert fabrication of a single-mode fibre connector alignment structure optimized by justified partial metallizationcitations
- 2013Low-coherence interferometry with polynomial interpolation on Compute Unified Device Architectur-enabled graphics processing units
- 2013Gloss, hydrophobicity and surface texture of papers with organic nanoparticle coatings
- 2013B-Calm: An open-source multi-GPU-based 3D-FDTD with multi-pole dispersion for plasmonics
- 2010Populating multi-fiber fiberoptic connectors using an interferometric measurement of fiber tip position and facet quality
- 2010Design and fabrication of embedded micro-mirror inserts for out-of-plane coupling in PCB-level optical interconnects
- 2008Hot embossing of microoptical components prototyped by deep proton writing
- 2008Embedded Micro-Mirror inserts for optical printed circuit boards
- 2008Deep Proton Writing: A tool for rapid prototyping of polymer micro-opto-mechanical modules
- 2007Deep Proton Writing: A tool for rapid prototyping polymer micro-opto-mechanical modules
- 2006Laser Ablation of Parallel Optical Interconnect Waveguides
Places of action
| Organizations | Location | People |
|---|
article
Deep proton writing with 12 MeV protons for rapid prototyping of microstructures in polymethylmethacrylate
Abstract
Deep proton writing ( DPW) is a fabrication technology developed for the rapid prototyping of polymer microstructures. We use polymethylmethacrylate (PMMA) substrates, which act as a positive resist, for irradiation with a collimated 12-MeV energy proton beam. Using 12 MeV enables the irradiation of increasingly thick PMMA substrates with less conicity of the sidewalls compared to the lower energies used in previous work. A microhole of 47.7 mu m diameter over a depth of 1 mm is achieved, leading to a maximum aspect ratio of 21:1. The sidewalls of the irradiated structures show a slightly conical shape and their root-mean-square surface roughness is lower than 50 nm averaged over 72 measured areas of 56 mu m x 44 mu m. This means that DPW components have optical surface quality sidewalls for wavelengths larger than 400 nm. Based on the trade-off among the sidewall roughness, conicity, and the development time, we determine that the optimal proton fluence for 12-MeV DPW in PMMA is 7.75 x 10(6) mu m(- 2.) Finally, we discuss some high aspect ratio microstructures with optical surface quality that were created with DPW to be used for a myriad of applications, such as micromirrors, microlenses, optofluidic devices, and high-precision alignment structures for single-mode optical fiber connectors. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)