| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Takayama, Osamu
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (32/32 displayed)
- 2024Alternative Plasmonic Materials for Biochemical Sensing: a Review (Invited Review)citations
- 2024Titanium Nitride Nanotrench Metasurfaces for Mid-infrared Chemical Sensingcitations
- 2023Optical properties of plasmonic titanium nitride thin films from ultraviolet to mid-infrared wavelengths deposited by pulsed-DC sputtering, thermal and plasma-enhanced atomic layer depositioncitations
- 2022Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor depositioncitations
- 2022Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor depositioncitations
- 2021Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengthscitations
- 2020Microspherical nanoscopy: is it a reliable technique?citations
- 2020Microspherical nanoscopy: is it a reliable technique?citations
- 2020Fabrication of hollow coaxial Al 2 O 3 /ZnAl 2 O 4 high aspect ratio freestanding nanotubes based on the Kirkendall effectcitations
- 2020Fabrication of hollow coaxial Al2O3/ZnAl2O4 high aspect ratio freestanding nanotubes based on the Kirkendall effectcitations
- 2020Wave Front Tuning of Coupled Hyperbolic Surface Waves on Anisotropic Interfacescitations
- 2019Doped silicon plasmonic nanotrench structures for mid-infrared molecular sensing
- 2019Optical properties of titanium nitride films under low temperature
- 2019Optical properties of titanium nitride films under low temperature
- 2019Cryogenic characterization of titanium nitride thin filmscitations
- 2019Doped silicon plasmonic nanotrench structures for mid-infrared molecular sensing
- 2019Optics with hyperbolic materialscitations
- 2019Plasmonic Characterization of Titanium Nitride Films under Low Temperatures
- 2019Plasmonic Characterization of Titanium Nitride Films under Low Temperatures
- 2019Optics with hyperbolic materialscitations
- 2019Lamellas metamaterials: Properties and potential applications
- 2019Lamellas metamaterials: Properties and potential applications
- 2018Initial Investigation for the Fabrication of Hyperbolic Metamaterials Based on Ultra-Thin Au Layers
- 2018Experimental observation of Dyakonov plasmons in the mid-infraredcitations
- 2017Advanced fabrication of hyperbolic metamaterials
- 2017Large-scale high aspect ratio Al-doped ZnO nanopillars arrays as anisotropic metamaterials.citations
- 2017Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics
- 2016Highly doped InP as a low loss plasmonic material for mid-IR regioncitations
- 2016Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer depositioncitations
- 2016Conductive Oxides Trench Structures as Hyperbolic Metamaterials in Mid-infrared Range
- 2016Fabrication of high aspect ratio TiO 2 and Al 2 O 3 nanogratings by atomic layer depositioncitations
- 2016Fabrication of deep-profile Al-doped ZnO one- and two-dimensional lattices as plasmonic elements
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article
Fabrication of hollow coaxial Al2O3/ZnAl2O4 high aspect ratio freestanding nanotubes based on the Kirkendall effect
Abstract
In this communication, fabrication of high aspect ratio Al 2 O 3 /ZnO/Al 2 O 3 nanotubes is reported and morphological changes at elevated temperatures are investigated. The structures were made by implementing several fabrication methods, such as deep-UV lithography, atomic layer deposition (ALD), and plasma etch methods. During the fabrication, the ALD deposited Al 2 O 3 and ZnO conformally passivated the prepared Si-holes template, resulting in the complex coaxial Al 2 O 3 /ZnO/Al 2 O 3 pillars. By utilizing several scanning and transmission electron microscopy techniques, it is experimentally shown that at elevated temperatures, internal voids form in the nanotube due to diffusion of ZnO into surrounding Al 2 O 3 and also ZnAl 2 O 4 spinel structure forms. Finally, the porous tubes have been isolated from the surrounding silicon core using a conventional isotropic selective Si plasma etch process. The presented approach opens the opportunity to build complex optical metamaterial compositions, for example, for a new generation of sensors for gas and biomarker detection.