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Adelmann, Christoph
IMEC
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Topics
Publications (11/11 displayed)
- 2024Al3Sc thin films for advanced interconnect applicationscitations
- 2022Properties of ultrathin molybdenum films for interconnect applicationscitations
- 2020Temperature-dependent resistivity of alternative metal thin filmscitations
- 2020Introduction to spin wave computingcitations
- 2018Effect of Annealing Ferroelectric HfO₂ Thin Films: In Situ, High Temperature X-Ray Diffractioncitations
- 2017Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl)(1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Propertiescitations
- 2016Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Coppercitations
- 2016Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Coppercitations
- 2013Roughness evolution during the atomic layer deposition of metal oxidescitations
- 2010Properties of Ultrathin High Permittivity (Nb1-xTax)(2)O-5 Films Prepared by Aqueous Chemical Solution Depositioncitations
- 2009Thermally stable high effective work function TaCN thin films for metal gate electrode applications
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article
Roughness evolution during the atomic layer deposition of metal oxides
Abstract
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films