| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Gardeniers, Han
University of Twente
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (26/26 displayed)
- 2024Alternative nano-lithographic tools for shell-isolated nanoparticle enhanced Raman spectroscopy substrates
- 2024Alternative nano-lithographic tools for shell-isolated nanoparticle enhanced Raman spectroscopy substratescitations
- 2023Fabrication of homogeneous shell-isolated sers substrates for catalytic applications
- 20233D‐Architected Alkaline‐Earth Perovskitescitations
- 2022Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumescitations
- 2022Additive Manufacturing of 3D Luminescent ZrO2:Eu3+ Architecturescitations
- 2022Vacuum-driven assembly of electrostatically levitated microspheres on perforated surfacescitations
- 2020Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithographycitations
- 2020Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etchingcitations
- 2020Spatial Segregation of Microspheres by Rubbing-Induced Triboelectrification on Patterned Surfacescitations
- 2018Three-dimensional fractal geometry for gas permeation in microchannelscitations
- 2018Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etchingcitations
- 2012Production and characterization of micro- and nano-features in biomedical alumina and zirconia ceramics using a tape casting routecitations
- 2008On the resilience of PDMS microchannels after violent optical breakdown microbubble cavitation
- 2007Integrated electrochemical sensor array for on-line monitoring of yeast fermentationscitations
- 2007Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110)citations
- 2006Fabrication of microfluidic networks with integrated electrodescitations
- 2006Monitoring of yeast cell concentration using a micromachnined impedance sensorcitations
- 2005Monitoring of yeast cell concentration using a micromachined impedance sensor
- 2003A low hydraulic capacitance pressure sensor for integration with a micro viscosity detectorcitations
- 2002Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactionscitations
- 2002Integrated Micro- and Nanofluidics: Silicon Revisitedcitations
- 2002Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation
- 2001Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connectionscitations
- 2001Failure mechanisms of pressurized microchannels, model, and experimentscitations
- 2000Failure mechanisms of pressurized microchannels, model and experiments
Places of action
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article
Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110)
Abstract
The application of a three dimensional, self-aligning shadow mask in (110)-oriented silicon for thin-film metal deposition is discussed. This shadow mask is used for the deposition of metal tracks on the bottom of structures with vertical sidewalls, i.e., the patterning of metal catalytic patches underneath the membrane that covers the deep flow channel of a high-temperature gas microreactor. The accuracy of this patch definition—pattern spreading—is investigated for rhodium and platinum as a function of the mask-to-substrate distance. The pattern of sputter-deposited patches is subject to pattern spreading when the gap between the shadow mask and the substrate is nonzero. The experimental patch widening shows a square root dependency on the gap size. Via numerical simulations of molecular gas flows using a direct simulation Monte Carlo method, it is shown that there is excellent agreement between the observed experimental data and this model taking into account values for the sticking () and accommodation () coefficients of the atoms on the walls of the shadow mask below unity (i.e., =0.5 and =0.1), and a baseline shift due to curvature and/or bending of the shadow mask and/or substrate.