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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Hokkanen, Ari
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2024Material engineering and application of hybrid biomimetic-de novo designed elastin-like polypeptidescitations
- 2024Respiratory rate monitoring with cellulose optical fiber
- 2022Optical properties of an organic-inorganic hybrid film made of regenerated cellulose doped with light-scattering TiO2 particlescitations
- 2022Hybrid films from cellulose nanomaterials—properties and defined optical patternscitations
- 2021Cellulose optical fiber
- 2021Cellulose optical fiber
- 2020Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge testcitations
- 2018Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge testcitations
- 2008Real-time analysis of PCR inhibition on microfluidic materialscitations
- 2007Use of brazing technique for manufacturing of high temperature fibre optical temperature and displacement transducercitations
- 2007Coating integrated optical fibres for monitoring of boiler heat transfer surfacescitations
- 2006Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchipcitations
- 2006Tunable hydrophilicity on a hydrophobic fluorocarbon polymer coating on siliconcitations
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article
Tunable hydrophilicity on a hydrophobic fluorocarbon polymer coating on silicon
Abstract
An efficient, economic, reliable, and repeatable patterning procedure of hydrophobic surfaces was developed. A fluorocarbon polymer derived from the C<sub>4</sub>F<sub>8</sub> gas in an inductively coupled plasma etcher was used as the hydrophobic coating. For a subsequent patterning of hydrophilic apertures on the polymer, a short O<sub>2</sub> plasma exposure through a silicon shadow mask was utilized. The overall hydrophilicity of the patterned surface can be tuned by the duration of the O<sub>2</sub> plasma exposure, and also by the density and the size of the hydrophilic apertures. The laborious photolithography and tricky lift-off procedures are avoided. Optimization of the whole patterning process is explained thoroughly and supported with experimental data. The hydrophilic adhesion of the patterned polymer was evaluated with aqueous droplets, which were studied on matrices of the hydrophilic apertures of different sizes. The deposition parameters of the fluorocarbon polymer, the size of the droplet required to enable rolling on the patterned surface, and the duration of the O<sub>2</sub> plasma exposure were considered as the main parameters. To determine the achievable resolution of the patterning procedure, the subsurface etching beneath the shadow mask was evaluated. The results show that a resolution of less than 10μm can be achieved. The simple hydrophilic patterning procedure described here can be used for the production of on-plane microfluidics, where a controlled adhesion or decohesion of 8–50μl droplets on the surface with a variable hydrophilicity from one location to another can be achieved.