| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Schubert, Eva
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2024In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2018Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniquescitations
- 2016Anisotropy, band-to-band transitions, phonon modes, and oxidation properties of cobalt-oxide core-shell slanted columnar thin filmscitations
- 2015Structural and optical properties of cobalt slanted nanopillars conformally coated with few-layer graphenecitations
- 2015Optical anisotropy of porous polymer film with inverse slanted nanocolumnar structure revealed via generalized spectroscopic ellipsometrycitations
- 2012Nanomagnetic skyrmionscitations
- 2012Optical properties of cobalt slanted columnar thin films passivated by atomic layer depositioncitations
- 2012Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Filmscitations
- 2011Length scales of interactions in magnetic, dielectric, and mechanical nanocompositescitations
- 2007Sub‐Wavelength Antireflection Coatings From Nanostructure Sculptured Thin Filmscitations
- 2005Ion beam sputter deposition of soft x-ray Mo∕Si multilayer mirrorscitations
Places of action
| Organizations | Location | People |
|---|
article
Ion beam sputter deposition of soft x-ray Mo∕Si multilayer mirrors
Abstract
<jats:p>Argon ion beam sputtering is used for production of high-quality Mo∕Si multilayer Bragg mirrors with 13.4nm center peak wavelength. The growth of the layer system was monitored in situ by real-time ellipsometry at multiple wavelengths within the visible to ultraviolet spectral region. The layer thicknesses of the individual multilayer constituents are obtained by model analysis of the ellipsometry data. Quality and performance of the soft x-ray mirrors is demonstrated by transmission electron microscopy, atomic force microscopy, glancing-angle of incidence CuKα reflectivity, and near-normal incidence soft x-ray reflectivity measurements. Thickness values obtained by transmission electron microscopy, reflectometry, and ellipsometry are critically compared.</jats:p>