| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Kristensen, Anders
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (36/36 displayed)
- 2022Resonant Laser Printing of Optical Metasurfacescitations
- 2022Resonant Laser Printing of Optical Metasurfacescitations
- 2019Nano structuring of silicone elastomers for optical applications
- 2017Electrospun Polymer Fiber Lasers for Applications in Vapor Sensingcitations
- 2017Electrospun Polymer Fiber Lasers for Applications in Vapor Sensingcitations
- 2016Optical sensors from electrohydrodynamic jetted polymer fiber resonatorscitations
- 2016Optical sensors from electrohydrodynamic jetted polymer fiber resonatorscitations
- 2015Smart plastic functionalization by nanoimprint and injection moldingcitations
- 2015Fiber-Based, Injection-Molded Optofluidic Systems: Improvements in Assembly and Applicationscitations
- 2015Electrospun dye-doped fiber networks: lasing emission from randomly distributed cavities
- 2015Fiber-Based, Injection-Molded Optofluidic Systemscitations
- 2014Injection molded pinched flow fractionation device for enrichment of somatic cells in cow milkcitations
- 2014Nanostructuring steel for injection molding toolscitations
- 2012All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes
- 2011Enhanced transduction of photonic crystal dye lasers for gas sensing via swelling polymer filmcitations
- 2011Injection molded nanofluidic chips: Fabrication method and functional tests using single-molecule DNA experimentscitations
- 2011UV Defined Nanoporous Liquid Core Waveguides
- 2011Selective gas sensing for photonic crystal lasers
- 2010Capacitance tuning of nanoscale split-ring resonatorscitations
- 2010UV patterned nanoporous solid-liquid core waveguidescitations
- 2010Nanoimprinted polymer photonic crystal dye laserscitations
- 2010Nanoimprinted polymer photonic crystal dye laserscitations
- 2009Capacitance tuning of nanoscale split-ring resonatorscitations
- 2009Capacitance tuning of nanoscale split-ring resonatorscitations
- 2007Optofluidic tuning of photonic crystal band edge laserscitations
- 2007Combined electron beam and UV lithography in SU-8citations
- 2007Tunability of optofluidic distributed feedback dye laserscitations
- 2007Nanoimprinted reflecting gratings for long-range surface plasmon polaritonscitations
- 2006Optofluidic third order distributed feedback dye lasercitations
- 2006Microfluidic Dye Lasers
- 2005Micro-fabricated solid state dye lasers based on a photo-definable polymercitations
- 2005Topas Based Lab-on-a-chip Microsystems Fabricated by Thermal Nanoimprint Lithographycitations
- 2004Nanoimprint lithography in the cyclic olefin copolymer, Topas, a highly ultraviolet-transparent and chemically resistant thermoplastcitations
- 2004PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated opticscitations
- 2003Investigation of the dye concentration influence on the lasing wavelength and threshold for a micro-fluidic dye lasercitations
- 2002Prediction Of Limit Rotational Speeds In A High-Speed Tool Bason FE Computed J-Integral Intensitiesed
Places of action
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article
Nanoimprint lithography in the cyclic olefin copolymer, Topas, a highly ultraviolet-transparent and chemically resistant thermoplast
Abstract
Thermal nanoimprint lithography (NIL) of the cyclic olefin copolymeric thermoplast Topas® isdemonstrated. Topas® is highly UV-transparent, has low water absorption, and is chemically resistant to hydrolysis, acids and organic polar solvents which makes it suitable for lab-on-a-chipapplications. In particular, Topas® is suitable for micro systems made for optical bio-detection since waveguides for UV-light can be made directly in Topas®. In this article full process sequences for spin coating Topas® onto 4 in. silicon wafers, NIL silicon stamp fabrication with micro and nanometer sized features, and the NIL process parameters are presented. The rheological propertiesof Topas® are measured and the zero shear rate viscosity is found to be 2.16x10<sup>4</sup> Pa s at 170 °C and3.6x10<sup>3</sup> Pa s at 200 °C while the dominant relaxation time is found to be 4.4 s and 0.9 s,respectively. The etch resistance of Topas® to two different reactive ion etch processes, an oxygenplasma, and an anisotropic silicon etch, is found to be 12.6 nm/s and 0.7 nm/s, respectively. The etch rates are compared to the similar etch rates of 950 k PMMA, cross-linked SU-8, and standard AZ5214E photoresist. Finally, UV-lithography (UVL) followed by metal deposition and lift-off ontop of a Topas® film patterned by NIL is demonstrated. This exploits the chemical resistance ofTopas® to sodium hydroxide and acetone. The demonstrated UVL and lift-off on top of an imprinted Topas® film opens new possibilities for post-NIL processing.