| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Bram, Martin
Forschungszentrum Jülich
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (17/17 displayed)
- 2024Correlative characterization of plasma etching resistance of various aluminum garnetscitations
- 2024Correlative characterization of plasma etching resistance of various aluminum garnets
- 2024Tooling in Spark Plasma Sintering Technology: Design, Optimization, and Applicationcitations
- 2021Advanced self-passivating alloys for an application under extreme conditionscitations
- 2019Argon-seeded plasma exposure and oxidation performance of tungsten-chromium-yttrium smart alloyscitations
- 2017Metal Supported SOFCs: Electrochemical Performance under Various Testing Conditions
- 2017Manufacturing of highly porous titanium by metal injection molding in combination with plasma treatment
- 2016Effect of internal current flow during the sintering of zirconium diboride by field assisted sintering technology ; Effekt des internen Stromflusses während der Sinterung von ZrB2 by FAST/SPScitations
- 2015Surface modification of highly porous titanium by plasma treatment
- 2013Examples for nanotechnological applications in the energy sector
- 2009Powder metallurgical near-net-shape fabrication of porous NiTi shape memory alloys for use as long-term implants by the combination of the metal injection molding process with the space-holder technique
- 2008Powder metallurgical production of TiNiNb and TiNiCu shape memory alloys by combination of pre-alloyed and elemental powders
- 2005The potential of powder metallurgy for the-fabrication of biomaterials on the basis of nickel-titanium : a case study with a staple showing shape memory behaviour
- 2005Inhibition of diffusion between metallic substrates and Ni-YSZ anodes during sintering
- 2005New production route for porous NiTi shape memory alloys
- 2004Metal injection molding for NiTi alloys
- 2003Near net shape fabrication of highly porous parts by powder metallurgy
Places of action
| Organizations | Location | People |
|---|
article
Correlative characterization of plasma etching resistance of various aluminum garnets
Abstract
Plasma etching is a crucial step in semiconductor manufacturing. High cleanliness and wafer-to-wafer reproducibility in the etching chamber are essential in order to successfully achieve nanometer-sized integrated functions on the wafer. The trend toward the application of more aggressive plasma compositions leads to higher demands on the plasma resistance of the materials used in the etching chamber. Due to its excellent etch resistance, yttrium aluminum garnet Y3Al5O12 (YAG) is starting to replace established materials like SiO2 or Al2O3 in this kind of application. In this study, reactive spark plasma sintering (SPS) was used to manufacture highly dense YAG ceramics from the respective oxides. In addition, yttrium was replaced with heavier lanthanoids (Er, Lu), intending to investigate the role of the A-site cation in the garnet type structure on the plasma erosion behavior. The produced materials were exposed to fluorine-based etching plasmas mimicking the conditions in the semiconductor manufacturing apparatus and the erosion behavior was characterized by atomic force microscopy (AFM), secondary ion mass spectrometry (SIMS), transmission electron microscopy (TEM), and profilometry. The induced chemical gradient in the samples is limited to a few nanometers below the surface, which makes its characterization challenging. For advanced analysis, we developed a correlative characterization method combining SIMS and scanning TEM (STEM)–energy-dispersive spectroscopy (EDS) enabling us to examine the structural and chemical changes in the reaction layer locally resolved. In the case of lanthanoid aluminates, an altered reaction layer and reduced fluorine penetration compared to YAG were found. However, a correlation between the characteristics of the induced chemical gradient and the determined physical erosion rates was not evident.