| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Nowakowski, Pawel
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2022Large Field of View and Artifact-Free Plan View TEM Specimen Preparation by Post-FIB Ar Milling
- 2022An Innovative Technique for Large-Scale Delayering of Semiconductor Devices with Nanometric-Scale Surface Flatness
- 2020Cutting-Edge Sample Preparation from FIB to Ar Concentrated Ion Beam Milling of Advanced Semiconductor Devices
- 2019Ultra-Thinning of Silicon for Backside Fault Isolationcitations
- 2019High Throughput and Multiple Length Scale Sample Preparation for Characterization and Failure Analysis of Advanced Semiconductor Devices
- 2018Narrow-Beam Argon Ion Milling of Ex Situ Lift-Out FIB Specimens Mounted on Various Carbon-Supported Gridscitations
- 2017Advanced Tools and Techniques for Delayering and Cross-Sectioning Semiconductor Devicescitations
- 2011Recent Developments in the Study of Grain Boundary Segregation by Wavelength Dispersive X-Ray Spectroscopy (WDS)
- 2010RuO<sub>2</sub> thin films deposited by spin coating on silicon substrates: pH‐dependence of the microstructure and catalytic propertiescitations
Places of action
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article
RuO<sub>2</sub> thin films deposited by spin coating on silicon substrates: pH‐dependence of the microstructure and catalytic properties
Abstract
<jats:title>Summary</jats:title><jats:p>RuO<jats:sub>2</jats:sub> thin films have been deposited on Si substrates by spin coating with precursor solutions having a pH varying between 1.4 and 4. X‐ray diffraction and transmission electron microscopy analyses are used to determine correlations between the solution pH and the film microstructure. As the pH varies, the RuO<jats:sub>2</jats:sub> crystal sizes reach a minimum value then increase; the porosity increases at the substrate/film interface with formation of large cavities. The catalytic activity of these RuO<jats:sub>2</jats:sub> layers in the presence of flowing air–methane is analysed by Fourier transform infrared spectroscopy of the conversion of CH<jats:sub>4</jats:sub> into CO<jats:sub>2</jats:sub>. The increasing porosity seems to improve the catalytic conversion rate of methane. Electrical impedance spectroscopy analyses show that the conductivity strongly depends on the thin‐film microstructure and porosity.</jats:p>