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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Engholm, Mathias
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2022A Hand-Held 190+190 Row–Column Addressed CMUT Probe for Volumetric Imagingcitations
- 2020Pull-in Analysis of CMUT Elementscitations
- 2020Large Scale High Voltage 192+192 Row-Column Addressed CMUTs Made with Anodic Bondingcitations
- 2020Electrical Insulation of CMUT Elements Using DREM and Lappingcitations
- 2020Electrical Insulation of CMUT Elements Using DREM and Lappingcitations
- 2019Imaging Performance for Two Row–Column Arrayscitations
- 2019188+188 Row–Column Addressed CMUT Transducer for Super Resolution Imagingcitations
- 2019CMUT Electrode Resistance Design: Modelling and Experimental Verification by a Row-Column Arraycitations
- 2018Probe development of CMUT and PZT row-column-addressed 2-D arrayscitations
- 2018Increasing the field-of-view of row–column-addressed ultrasound transducers: implementation of a diverging compound lenscitations
- 2018Capacitive Micromachined Ultrasonic Transducers for 3-D Imaging
- 2018Design of a novel zig-zag 192+192 Row Column Addressed Array Transducer: A simulation study.citations
- 2017Output Pressure and Pulse-Echo Characteristics of CMUTs as Function of Plate Dimensionscitations
- 20163-D Vector Flow Using a Row-Column Addressed CMUT Arraycitations
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document
188+188 Row–Column Addressed CMUT Transducer for Super Resolution Imaging
Abstract
A capacitive micromachined ultrasonic transducer (CMUT), 8 MHz resonance frequency, λ/2 cell pitch 188+188 row-column addressed (RCA) array for super resolution imaging is presented. The top- and bottom electrode design features a zig-zag shaped pattern to increase the active cell area for fixed plate thicknesses. The RCA CMUT has been fabricated utilising a deposit, remove, etch, multistep (DREM) process to fully separate the bottom electrodes electrically as well as anodic bonding the array to an insulating borosilicate glass wafer. Linear test elements have been characterized. Electrical measurements show a center frequency of approximately 5.5 MHz and a coupling coefficient of 7.8% for -80 V DC bias and 50 mV AC. Acoustic measurements made in immersion with a single cycle 4 MHz pulse with a -90 V DC bias demonstrate that the fabricated CMUT arrays can emit broadband ultrasound pulses.