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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Karuthedath, Cyril Baby
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2023Non-monolithic fabrication of thin-film microelectrode arrays on PMUT transducers as a bimodal neuroscientific investigation toolcitations
- 2023An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implantscitations
- 2023Piezoelectric ultrasonic transducer and system
- 2023Phase-Sensitive Air Flow Measurement Using PMUTscitations
- 2021Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabricationcitations
- 2021Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabricationcitations
- 2020The impact of residual stress on resonating piezoelectric devicescitations
- 2019Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurementscitations
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document
Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements
Abstract
Beam-drift based flow measurement technique requires frequency matched ultrasound transmitters and receivers for determining the flow rate. Aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) suitable for such an application have been designed and fabricated. The bottom electrode is designed in such way that it reduces the stray capacitances, without degrading the piezoelectric properties of the AlN layer deposited on it. Frequency matching within a PMUT array and PMUTs fabricated across a wafer are challenging due to residual stress and membrane radius variations. A fabrication process to reduce the residual stress by optimizing the AlN layer deposition parameters, and membrane radius variations by optimizing Deep Reactive Ion Etching (DRIE) process, is developed in this work. The relative frequency variation (Δf*100/f) of the fabricated 7-element transmitter array is 0.5 %, and the variation between two receiver elements is 0.8%. Even though there is frequency variation across the wafer, PMUT transmitters and receivers within a reticle have matching frequencies and they can be utilized as transmitter-receiver pairs for flow measurement applications.