| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Engholm, Mathias
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2022A Hand-Held 190+190 Row–Column Addressed CMUT Probe for Volumetric Imagingcitations
- 2020Pull-in Analysis of CMUT Elementscitations
- 2020Large Scale High Voltage 192+192 Row-Column Addressed CMUTs Made with Anodic Bondingcitations
- 2020Electrical Insulation of CMUT Elements Using DREM and Lappingcitations
- 2020Electrical Insulation of CMUT Elements Using DREM and Lappingcitations
- 2019Imaging Performance for Two Row–Column Arrayscitations
- 2019188+188 Row–Column Addressed CMUT Transducer for Super Resolution Imagingcitations
- 2019CMUT Electrode Resistance Design: Modelling and Experimental Verification by a Row-Column Arraycitations
- 2018Probe development of CMUT and PZT row-column-addressed 2-D arrayscitations
- 2018Increasing the field-of-view of row–column-addressed ultrasound transducers: implementation of a diverging compound lenscitations
- 2018Capacitive Micromachined Ultrasonic Transducers for 3-D Imaging
- 2018Design of a novel zig-zag 192+192 Row Column Addressed Array Transducer: A simulation study.citations
- 2017Output Pressure and Pulse-Echo Characteristics of CMUTs as Function of Plate Dimensionscitations
- 20163-D Vector Flow Using a Row-Column Addressed CMUT Arraycitations
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document
Output Pressure and Pulse-Echo Characteristics of CMUTs as Function of Plate Dimensions
Abstract
This paper presents an experimental study of the acoustic performance of Capacitive Micromachined Ultrasonic Transducers (CMUTs) as function of plate dimensions. The objective is to increase the output pressure without decreasingthe pulse-echo signal. The CMUTs are fabricated with a LOCOS process, followed by direct wafer fusion bonding to a Silicon-On-Insulator (SOI) wafer. In this way, the plate thickness is determined by the SOI wafer device layer thickness, resulting in CMUTs with plate thicknesses of 2, 9.3 and 15 μm. The corresponding radii and gap heights resulting in an immersion frequency of 5MHz and a pull-in voltage of 200V are obtained using finite element analysis. Hydrophone and plane reflector measurements are used to assess the acoustic performance. Increasing the plate thickness from 2μm to 15μm decreases the pulse-echo bandwidth from >100% to 30%. A maximum in both peak-to-peak output pressure and pulse-echo signal is obtained for the 9.3μm plate, which still has a moderate pulseecho bandwidth of 60%. The 9.3μm plate results in a 1.9 times higher peak-to-peak output pressure and a 3.6 times higherpulse-echo signal compared to the 2μm plate. By adjusting the plate dimensions of a CMUT it is possible to optimize its acoustic performance for medical imaging applications, including visualization of deeper structures in the body, as well as nonlinear imaging such as tissue harmonic imaging.