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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Alastalo, Ari
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Topics
Publications (22/22 displayed)
- 2020Printed, Highly Stable Metal Oxide Thin-Film Transistors with Ultra-Thin High-κ Oxide Dielectriccitations
- 2020Printed, Highly Stable Metal Oxide Thin-Film Transistors with Ultra-Thin High-κ Oxide Dielectriccitations
- 2018Systematic Design of Printable Metasurfacescitations
- 2018Systematic Design of Printable Metasurfaces: Validation Through Reverse-offset Printed Millimeter-wave Absorberscitations
- 2018Systematic Design of Printable Metasurfaces:Validation Through Reverse-offset Printed Millimeter-wave Absorberscitations
- 2016Towards printed millimeter-wave components:Material characterizationcitations
- 2016Towards printed millimeter-wave componentscitations
- 2016Towards printed millimeter-wave components: Material characterizationcitations
- 2015Gravure printed sol-gel derived AlOOH hybrid nanocomposite thin films for printed electronicscitations
- 2015Gravure printed sol-gel derived AlOOH hybrid nanocomposite thin films for printed electronicscitations
- 2014Modelling of printable metal-oxide TFTs for circuit simulation
- 2013Roll-to-Roll manufacturing of printed OLEDscitations
- 2012Flexible bio-based pigment nanocellulose substrate for printed electronics
- 2012Water-based carbon-coated copper nanoparticle fluid:Formation of conductive layers at low temperature by spin coating and inkjet depositioncitations
- 2012Water-based carbon-coated copper nanoparticle fluidcitations
- 2011Synthesis of cobalt nanoparticles to enhance magnetic permeability of metal-polymer compositescitations
- 2010Substrate-facilitated nanoparticle sintering and component interconnection procedurecitations
- 2010Electrical Sintering of Conductor Grids for Optoelectronic Devices
- 2010A process for SOI resonators with surface micromachined covers and reduced electrostatic gapscitations
- 2010Printable WORM and FRAM memories and their applications
- 2008R2R Electrical Sintering of Nanoparticle Structures
- 2007Piezotransduced single-crystal silicon BAW resonatorscitations
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document
Piezotransduced single-crystal silicon BAW resonators
Abstract
We report on the design, fabrication and measurement of 13-MHz piezoelectrically actuated single-crystal silicon beam resonators operating in the first length-extensional mode. The transduction mechanism is based on an aluminum nitride layer grown on top of the resonator beam. The resonators are measured to have a quality factor of Q ~ 20000 at p < 1 mbar and typical motional resistance of Rm ~ 3 kOmega. The electromechanical transduction factor is eta ~20 muN/V, representing a coupling of the same order as produced by 20 V over a 100-nm gap for capacitively coupled resonators. The quality factor is observed to be dependent on the crystal direction of the resonator beam. A qualitative explanation for this effect is given.