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Thurner, Thomas
Montanuniversität Leoben
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2021Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidarscitations
- 2015Real-Time Detection and Measurement of Cracks in Fatigue Test Applicationscitations
- 2008Optical 2D displacement and strain sensor for creep testing of material samples in transparent fluidscitations
- 2002A novel capacitance sensor principle applicable for spatially resolving downhole measurements
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article
Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars
Abstract
This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing the direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64% and 0.26%, respectively, for 2grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91% and 0.15% for y axis vibration, corresponding to 44.4% and 43.0% reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.