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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Tranchant, Laurent
Institut photonique d'analyse non-destructive européen des matériaux anciens
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2017Polaritonic figure of merit of plane structurescitations
- 2015Guided near-field radiative heat transfer : study of nanostructures supporting surface phonon-polaritons
- 2015Measurement of the in-plane thermal conductivity of SiO2 thin films due to surface phonon-polaritons
- 2015Focusing of surface phonon-polaritons along conical and wedge polar nanostructurescitations
- 2014Fresnel-like formulas for the reflection and transmission of surface phonon-polaritons at a dielectric interfacecitations
- 2014Effects of anisotropy and size of polar nano thin films on their thermal conductivity due to surface phonon-polaritonscitations
- 2013Anomalous thermal conductivity by surface phonon-polaritons of polar nano thin films due to their asymmetric surrounding mediacitations
Places of action
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conferencepaper
Measurement of the in-plane thermal conductivity of SiO2 thin films due to surface phonon-polaritons
Abstract
Reduction of the phonon thermal conductivity of thin films as their thickness is scaled down raises a lot of difficulties for the thermal management of nanodevices used in microelectronics or optics. In this work we aim to experimentally prove that the thermal conductivity of silicon dioxide thin films can be enhanced by taking advantage of surface effects, through the propagation of surface phonon-polaritons. The strengthening of these effects for increasingly thinner films enables to offset the decrease of their thermal properties. Periodically laser-heating method is used to measure the in-plane thermal diffusivity of suspended silicon dioxide thin films with strong surface resonances. The thermal conductivity is then determined through a simple relation. Plasma-enhanced chemical vapour deposition (PECVD) and dry oxidation techniques are used to produce thin films with thicknesses from 2 pmi to 50 nm. Purity and surface quality are controlled using a scanning electron microscope and energy-dispersive X-ray spectroscopy. Based on our theoretical results we expect a total in-plane thermal conductivity of about 2 W/(m.K) for a 50 nm-Thick glass thin film at room temperature.