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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Wollack, Edward
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (17/17 displayed)
- 2022Plasma based production of AlF<SUB>3</SUB>-passivated aluminum mirrors for UVOIR astronomycitations
- 2022Characterization of aerogel scattering filters for astronomical telescopes
- 2022Testing CMB Anomalies in E-mode Polarization with Current and Future Data
- 2021Process for fabricating one or more ultra-large area nanoscale polymer films
- 2021Fabricating ultra-thin structured polymer films
- 2021The Simons Observatory: metamaterial microwave absorber and its cryogenic applications.citations
- 2020The CLASS 150/220 GHz Polarimeter Array: Design, Assembly, and Characterizationcitations
- 2019Low-Loss Microstrip Transmission Line Fabricated with Improved Liftoff Process
- 2018Modeling Strategies for Superconducting Microstrip Transmission Line Structurescitations
- 2017Superconducting Vacuum-Gap Crossovers for High Performance Microwave Applicationscitations
- 2016Superconducting Vacuum-Gap Crossovers for High Performance Microwave Applications
- 2016Wide-stopband aperiodic phononic filterscitations
- 2016Silicon-Based Antenna-Coupled Polarization-Sensitive Millimeter-Wave Bolometer Arrays for Cosmic Microwave Background Instrumentscitations
- 2014A Cryogenic Infrared Calibration Targetcitations
- 2008Compact Low-Loss Planar Magic-T
- 2007Electromagnetic and Thermal Properties of a Conductively Loaded Epoxycitations
- 2005Ultra-Compact Broadband High-Spurious Suppression Bandpass Filter Using Double Split-end Stepped Impedance Resonators
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article
Superconducting Vacuum-Gap Crossovers for High Performance Microwave Applications
Abstract
The design and fabrication of low-loss wide-bandwidth superconducting vacuum-gap crossovers for high performance millimeter wave applications are described. In order to reduce ohmic and parasitic losses at millimeter wavelengths a vacuum gap is preferred relative to dielectric spacer. Here, vacuum-gap crossovers were realized by using a sacrificial polymer layer followed by niobium sputter deposition optimized for coating coverage over an underlying niobium signal layer. Both coplanar waveguide and microstrip crossover topologies have been explored in detail. The resulting fabrication process is compatible with a bulk micro-machining process for realizing waveguide coupled detectors, which includes sacrificial wax bonding, and wafer backside deep reactive ion etching for creation of leg isolated silicon membrane structures. Release of the vacuum gap structures along with the wax bonded wafer after DRIE is implemented in the same process step used to complete the detector fabrication