| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Hashim, Uda
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2023Dielectric Properties and Microwave Absorbing Properties of Silicon Carbide Nanoparticles and Silicon Carbide Nanowhiskers
- 2023Formation of polypropylene nanocomposite joint using silicon carbide nanowhiskers as novel susceptor for microwave weldingcitations
- 2019Fabrication of gold nanorod–zinc oxide nanocomposite on gap-fingered integrated interdigitated aluminum electrodes and their response to electrolytescitations
- 2017Synthesis of silicon carbide nanowhiskers by microwave heating: effect of heating durationcitations
- 2017Substrate-gate coupling in ZnO-FET biosensor for cardiac troponin I detectioncitations
- 2016Novel synthesis of silicon carbide nanotubes by microwave heating of blended silicon dioxide and multi-walled carbon nanotubes: The effect of the heating temperaturecitations
- 2016Interdigitated Electrodes integrated with zinc oxide nanoparticles for Cardiac Troponin I biomarker detectioncitations
- 2015Ab initio method of optical investigations of CdS1−xTex alloys under quantum dots diameter effectcitations
- 2015Real-time detection by properties of tin dioxide for formaldehyde gas sensorcitations
- 2015Structural, optical and electrical properties of Cu2Zn1źxCdxSnS4 quinternary alloys nanostructures deposited on porous siliconcitations
- 2015Deposition and characterization of ZnO thin film for FET with back gate biasing-based biosensors applicationcitations
- 2014Glass etching for cost-effective microchannels fabricationcitations
- 2014Selective growth of ZnO nanorods on microgap electrodes and their applications in UV sensors
- 2012Sol-gel Synthesis of TiO 2 Thin Films from In-house Nano-TiO 2 Powder
- 2008Silicon nitride gate ISFET fabrication based on four mask layers using standard MOSFET technologycitations
Places of action
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document
Glass etching for cost-effective microchannels fabrication
Abstract
The available fabrication of microfluidic in industry involves with complex and expensive procedures. It is crucial to find another alternative which can reduce the cost production, simplify the process, and promote to a rapid production cycle. In this paper, a cost-effective approach of glass etching procedure for microchannels fabrication is described. The procedure involves with masking preparation using positive photoresist PR1-4000A, photolithography technique, and effective wet chemical etching process. From the experimental, good photoresist mask thickness and adherence was achieved. Then, acceptable etching rate, photoresist resistant, and surface roughness were obtained with suitable hydrofluoric acid (HF), hydrochloric acid (HC1), and de-ionized (DI) water composition. The presented simple fabrication process is suitable for fast prototyping and manufacturing disposable microfluidic devices. With the optimized process, a glass-based microchannels with etching depth up to 70um was produced.