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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Voon, Chun Hong
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2023Dielectric Properties and Microwave Absorbing Properties of Silicon Carbide Nanoparticles and Silicon Carbide Nanowhiskers
- 2023Feasibility Study of Microwave Welding of Polypropylene Using Silicon Carbide Nanowhiskers as Microwave Susceptorcitations
- 2023Formation of polypropylene nanocomposite joint using silicon carbide nanowhiskers as novel susceptor for microwave weldingcitations
- 2018Characterization of reduced graphene oxide obtained from vacuum-assisted low-temperature exfoliated graphitecitations
- 2017Synthesis of silicon carbide nanowhiskers by microwave heating: effect of heating durationcitations
- 2016Novel synthesis of silicon carbide nanotubes by microwave heating of blended silicon dioxide and multi-walled carbon nanotubes: The effect of the heating temperaturecitations
- 2015Real-time detection by properties of tin dioxide for formaldehyde gas sensorcitations
- 2015Deposition and characterization of ZnO thin film for FET with back gate biasing-based biosensors applicationcitations
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document
Deposition and characterization of ZnO thin film for FET with back gate biasing-based biosensors application
Abstract
This paper presents the preparation and characterization of zinc oxide (ZnO) thin film prior deposition on the channel of field-effect transistor with back gate biasing (FET-BG) for biosensing application. Sol-Gel technique is a chosen method for the preparation of the ZnO seed solution, followed by the deposition process through spin coating technique on the silicon dioxide (SiO2). Prior to that, the SiO2 layer is grown on a silicon die. The ZnO seed solution is deposited at various numbers of coating layer (1, 3, and 5 coating layers), baked, and annealed prior to characterization of its surface morphological, structural, crystalline phase, and electrical characterization. The results obtained give a significant evidences for the future deposition process of the ZnO thin films as the FET-BG biosensor device on the silicon-on-insulator (SOI) wafer.