| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Marsi, Noraini
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2021Dynamic mechanical analysis and morphology of petroleum-based and bio-epoxy foams with wood fillercitations
- 2021Compressive strength, sound absorption coefficient (SAC) and water absorption analysis of HDPE plastic waste reinforced polystyrene and Portland cement for lightweight concrete (LWC)citations
- 2021Bending strength analysis of HDPE plastic reinforced wood waste and thermoplastic polymer to replace ceramic tile compositescitations
- 2021Characterization of foam materials based on HDPE plastic waste for automotive seat application
- 2021Develop Interlocking Concrete Block Pavement from Portland Cement, Polystyrene and Bottom Ash on Pedestrian Roadcitations
- 2020The Mechanical Performance of Tile Based on Plastic Waste (PW) Mixed Wood Waste (MWW)citations
- 2020The Mechanical Performance of Pipe Based on Fiberglass Reinforced with Plastic Waste (FRPW) Compositescitations
- 2020Utilization of Banana (Musa Paradisiaca) Peel As Bioplastic for Planting Bag Application
- 2019Graphene Composite Blueberries based Pencil Lead act as Superhydrophobic Coating on Plastic Surfaces for Solar Application
- 2019Endurance of Renewable Polymer Composite to UV Irradiation
- 2018Dynamic Mechanical Thermal Analysis of Wood Polymer Composite Endurance to Prolonged Ultra Violet Irradiation Exposurecitations
- 2016Ballistic Impact Response of Woven Hybrid Coir/Kevlar Laminated Compositescitations
- 20153C-SiC-on-Si based MEMS packaged capacitive pressure sensor operating up to 500 ºC and 5 MPacitations
- 2015The Mechanical Characterization of Bending Test for MEMS Capacitive Pressure Sensor Based 3C-SiC in High Temperaturecitations
- 2014Development of high temperature resistant of 500 °C employing silicon carbide (3C-SiC) based MEMS pressure sensorcitations
- 2013Biopolymer Doped with Titanium Dioxide Superhydrophobic Photocatalysis as Self-Clean Coating for Lightweight Compositecitations
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document
3C-SiC-on-Si based MEMS packaged capacitive pressure sensor operating up to 500 ºC and 5 MPa
Abstract
This paper reports a packaged MEMS capacitive pressure sensor based 3C-SiC using bulk-micromachining technology that operates on the pressure up to 5.0 MPa and temperature up to 500 oC. The diaphragm employs a single-crystal 3C-SiC thin film that is back-etched from its Si substrate. A photosensitive ProTEK PSB is used as a protection mask layer to reduce the process steps. We compare our results with similar work that also employs a single-crystal 3C-SiC-on-Si capacitive pressure sensor with ceramic package. The MEMS capacitive pressure sensor is employed with 3C-SiC that was performed using hot wall low pressure chemical vapor deposition (LPCVD) reactors at the Queensland Micro and Nanotechnology Center (QMNC), Griffith University. This paper also focuses on comparing those two highest efficiency distributions in MEMS capacitive pressure sensor device to other types of MEMS capacitive pressure sensor. Different temperature, hysteresis and repeatability tests are presented to demonstrate the functionality of the packaged MEMS capacitive pressure sensor. As expected, the output hysteresis has low hysteresis (less than 0.05%) which has inflexibility greater than traditional silicon. By utilizing this low hysteresis was revealed the packaged MEMS capacitive pressure sensor has high repeatability and stability of the sensor.