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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Keating, Adrian
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2022Determination of thermal conductivity, thermal diffusivity and specific heat capacity of porous silicon thin films using the 3ω methodcitations
- 2022Analytic approximation for the collapse of viscous tubes driven by surface tension and pressure difference
- 2019Compensating porosity gradient to produce flat, micromachined porous silicon structurescitations
- 2018MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imagingcitations
- 2016A collaborative data library for testing prognostic models
- 2009Low temperature N2-based passivation technique for porous silicon thin filmscitations
- 2007Process condition dependence of mechanical and physical properties of silicon nitride thin filmscitations
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document
MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging
Abstract
<p>We present a MEMS tunable Fabry-Pérot filter platform for multi- A nd hyper-spectral sensing and imaging across the SWIR, MWIR or LWIR wavelength bands. The technology employs surface micromachined, tensile silicon membranes to create a movable distributed Bragg reflector (DBR) as part of a Fabry-Perot structure. Fabricated 1 mm-dimension broad band SWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 μm. These millimetre-scale tunable filters show excellent surface flatness in the order of 15 nm, and excellent optical uniformity, with a transmission peak wavelength variability of 5% across the entire optical tuning range. We also demonstrate narrow-band Fabry-Perot filters suitable for hyperspectral sensing and/or imaging, using air as the low-index medium in the movable DBR to improve reflectivity. These filters are also demonstrated in the SWIR wavelength range, and achieve narrow spectral linewidths of δλ/λ<sub>c</sub> < 2%.</p>