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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Engholm, Mathias
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2022A Hand-Held 190+190 Row–Column Addressed CMUT Probe for Volumetric Imagingcitations
- 2020Pull-in Analysis of CMUT Elementscitations
- 2020Large Scale High Voltage 192+192 Row-Column Addressed CMUTs Made with Anodic Bondingcitations
- 2020Electrical Insulation of CMUT Elements Using DREM and Lappingcitations
- 2020Electrical Insulation of CMUT Elements Using DREM and Lappingcitations
- 2019Imaging Performance for Two Row–Column Arrayscitations
- 2019188+188 Row–Column Addressed CMUT Transducer for Super Resolution Imagingcitations
- 2019CMUT Electrode Resistance Design: Modelling and Experimental Verification by a Row-Column Arraycitations
- 2018Probe development of CMUT and PZT row-column-addressed 2-D arrayscitations
- 2018Increasing the field-of-view of row–column-addressed ultrasound transducers: implementation of a diverging compound lenscitations
- 2018Capacitive Micromachined Ultrasonic Transducers for 3-D Imaging
- 2018Design of a novel zig-zag 192+192 Row Column Addressed Array Transducer: A simulation study.citations
- 2017Output Pressure and Pulse-Echo Characteristics of CMUTs as Function of Plate Dimensionscitations
- 20163-D Vector Flow Using a Row-Column Addressed CMUT Arraycitations
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article
A Hand-Held 190+190 Row–Column Addressed CMUT Probe for Volumetric Imaging
Abstract
This paper presents the design, fabrication, and characterization of a 190+190 row-column addressed (RCA) capacitive micromachined ultrasonic transducer (CMUT) array integrated in a custom hand-held probe handle. The array has a designed 4.5 MHz center frequency in immersion and a pitch of 95 μm which corresponds to ≈ λ/4. The array has a 2.14 × 2.14 cm2 footprint including an integrated apodization scheme to reduce ghost echoes when performing ultrasound imaging. The array was fabricated using a combination of fusion and anodic bonding, and a deposit, remove, etch, multistep (DREM) etch to reduce substrate coupling and improve electrode conductivity. The transducer array was wire-bonded to a rigid-flex printed circuit board (PCB), encapsulated in room temperature vulcanizing (RTV) silicone polymer, electromagnetic interference (EMI) shielded, and mounted in a 3D-milled PPSU probe handle. The probe was characterized using the SARUS experimental scanner and 3D volumetric imaging was demonstrated on scatter and wire phantoms. The imaging depth was derived from tissue mimicking phantom measurements (0.5 dB MHz-1 cm-1 attenuation) by estimating the SNR at varying depths. For a synthetic aperture imaging sequence with 96+96 emissions the imaging depth was 3.6 cm. The center frequency measured from the impulse response spectra in transmit and pulse-echo was 6.0 ± 0.9 MHz and 5.3 ± 0.4 MHz, and the corresponding relative bandwidths were 62.8 ± 4.5 % and 86.2 ± 10.4 %. The fabrication process showed clear improvement in relative receive sensitivity and transmit pressure uniformity compared to earlier silicon-on-insulator (SOI) based designs. However, at the same time it presented yield problems resulting in only around 55 % elements with a good response.