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Elwenspoek, M. C.
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Publications (6/6 displayed)
- 2007Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110)citations
- 2006A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonatorscitations
- 2005Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal depositioncitations
- 2002Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation
- 2001Platinum patterning by a modified lift-off technique and its application in a silicon load cell
- 2000Characterization of platinum lift off technique
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document
Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition
Abstract
We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.