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Bonnema, Maarten J. S.
University of Twente
in Cooperation with on an Cooperation-Score of 37%
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document
Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes
Abstract
This paper reports an inline sensor for the<br/>real-time measurement of the relative permittivity of a<br/>continuously flowing fluid, with electrodes that are<br/>electrically isolated from the fluid. The sensor has been<br/>characterised for relative permittivity values ranging from<br/>1 to 80 – including water and water-containing mixtures –<br/>showing an accuracy within 3% of full scale. The proposed<br/>sensor contains multiple parallel microchannels, each of<br/>which has parallel electrodes in the sidewall, resulting in a<br/>low pressure drop and high sensitivity while the internal<br/>volume is only 50 nL. The fabrication technology is<br/>scalable: equally deep microchannels with widths of 5, 10,<br/>20, and 40 μm are demonstrated. The technology is also<br/>compatible with other inline sensors, enabling further<br/>on-chip integration.