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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Cao, Wei
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2024Activating 2D MoS2 by loading 2D Cu–S nanoplatelets for improved visible light photocatalytic hydrogen evolution, drug degradation, and CO2 reductioncitations
- 2022Uncovering temperature-tempted coordination of inclusions within ultra-high-strength-steel via in-situ spectro-microscopycitations
- 2022Unveiling nano-scaled chemical inhomogeneity impacts on corrosion of Ce-modified 2507 super-duplex stainless steelscitations
- 2021Unveiling interactions of non-metallic inclusions within advanced ultra-high-strength steel: A spectro-microscopic determination and first-principles elucidation
- 2021Spray-Deposited Anisotropic Ferromagnetic Hybrid Polymer Films of PS-b-PMMA and Strontium Hexaferrite Magnetic Nanoplateletscitations
- 2021Spray-Deposited Anisotropic Ferromagnetic Hybrid Polymer Films of PS- b -PMMA and Strontium Hexaferrite Magnetic Nanoplateletscitations
- 2020Self-Assembly of Large Magnetic Nanoparticles in Ultrahigh Molecular Weight Linear Diblock Copolymer Filmscitations
- 2019Self-Assembly in ultrahigh molecular weight sphere-forming diblock copolymer thin films under strong confinementcitations
- 2018Ion implantation in silicon for trimming the operating wavelength of ring resonatorscitations
- 2018Metallic contact between MoS2 and Ni via Au Nanogluecitations
- 2018Comparison of UV Irradiation and Sintering on Mesoporous Spongelike ZnO Films Prepared from PS-b-P4VP Templated Sol–Gel Synthesiscitations
- 2017Towards autonomous testing of photonic integrated circuitscitations
Places of action
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article
Ion implantation in silicon for trimming the operating wavelength of ring resonators
Abstract
In recent years, we have presented results on the development of erasable gratings in silicon to facilitate wafer scale testing of photonics circuits via ion implantation of germanium. Similar technology can be employed to control the operating wavelength of ring resonators, which is very sensitive to fabrication imperfections. Ion implantation into silicon causes radiation damage resulting in a refractive index increase, and can therefore form the basis of multiple optical devices. In this paper we discuss design, modelling and fabrication of ring resonators and their subsequent trimming using ion implantation of germanium into silicon, followed by either rapid thermal annealing or localized laser annealing. The results confirm the ability permanently tune the position of the resonant wavelength to any point inside the free spectral range of the ring resonator, thus greatly reducing the amount of power required for active tuning of these devices.