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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Martyniuk, Mariusz
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2022Iron oxide-Palladium core-shell nanospheres for ferromagnetic resonance-based hydrogen gas sensingcitations
- 2022Application of a Microfabricated Microwave Resonator in a Co-Pd-Based Magnetic Hydrogen-Gas Sensorcitations
- 2018Effect of thermal annealing on stress relaxation and crystallisation of ion beam sputtered amorphous Si1-xGex thin filmscitations
- 2018MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imagingcitations
- 2017Large-Area MEMS Tunable Fabry-Perot Filters for Multi/Hyperspectral Infrared Imagingcitations
- 2016Investigation of Thermal Expansion Effects on Si-Based MEMS Structurescitations
- 2016Preparation and characterization of cerium substituted bismuth dysprosium iron garnets for magneto-optic applicationscitations
- 2014Characterization of mechanical, optical and structural properties of bismuth oxide thin films as a write-once medium for blue laser recordingcitations
- 2014Characterization of mechanical, optical and structural properties of bismuth oxide thin films as a write-once medium for blue laser recording
- 2014Investigation of cerium-substituted europium iron garnets deposited by biased target ion beam depositioncitations
- 2009Elasto-plastic characterisation of low-temperature plasma-deposited silicon nitride thin films using nanoindentationcitations
- 2007Dielectric thin films for MEMS-based optical sensorscitations
- 2006Stress in low-temperature plasma enhanced chemical vapour deposited silicon nitride thin filmscitations
- 2005Determination of mechanical properties of silicon nitride thin films using nanoindentationcitations
- 2005Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin filmscitations
- 2004Evaluation of elastic modulus and hardness of thin films by nanoindentationcitations
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article
Large-Area MEMS Tunable Fabry-Perot Filters for Multi/Hyperspectral Infrared Imaging
Abstract
<p>This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a single-layer tensile silicon or germanium membrane for the suspended top mirror. Optical characterization of the fabricated single-membrane-based tunable filters for the SWIR, MWIR, and LWIR is presented. The fabricated 1000-μm dimension Si-membrane-based SWIR and MWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 and 4.1-4.9 μm, respectively, while the fabricated 200-μm-dimension Ge-membrane-based LWIR filter is demonstrated with a wavelength tuning range of 8.5-11.46 μm. All these filters are shown to achieve transmission characteristics that exceed the optical requirements for multispectral imaging applications. A large-area 1-cm dimension Si membrane-based SWIR tunable Fabry-Perot filter for multispectral imaging is demonstrated as a proof-of-concept, showing an excellent surface flatness in the order of 25 nm and an excellent optical uniformity with transmission peak wavelength variability less than 3% across the entire 1-cm dimension optical imaging area. In addition, the optical transmission behavior of the Fabry-Perot filters based on three-layer Si or Ge-based air-spaced DBRs for SWIR, MWIR, and LWIR is modeled, demonstrating that these filters can achieve a fine spectral resolution of several tens of nanometers suitable for hyperspectral imaging applications.</p>