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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Bergmann, Alexander
Graz University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2024Comparative analysis of fabrication techniques for sensing windows on silicon nitride waveguide platforms
- 2024Millimeter Wave Metamaterial-based Strain Sensor Concept
- 2023Large-scale automated emission measurement of individual vehicles with point samplingcitations
- 2022Humidity Responsive Reflection Grating Made by Ultrafast Nanoimprinting of a Hydrogel Thin Filmcitations
- 2021Silicon Nitride Photonic Particle Detector-Experiments and Model Assessmentcitations
- 2020Vacuum-Assisted Selective Adhesive Imprinting for Photonic Packaging of Complex MOEMS Devicescitations
- 2020Fast optical humidity sensor based on nanostructured hydrogels
- 2019Vacuum-assisted selective adhesive imprinting for heterogeneous system integration of MOEMS devices
- 2019Fast Optical Humidity Sensor Based on Hydrogel Thin Film Expansion for Harsh Environmentcitations
- 2019State Estimation Approach of Lithium-Ion Batteries by Simplified Ultrasonic Time-of-Flight Measurementcitations
- 2018First Steps towards a Super-Compact in-situ Laser-Induced-Incandescence Sensor System
- 2017Modelling chemical degradation of ionomer in a polymer electrolyte fuel cell
- 2004Interpretation of small-angle scattering data of inhomogeneous ellipsoidscitations
- 2004Small Angle X-Ray Scattering with Cobalt Radiation for Nanostructure Characterization of Fe-Based Specimen
- 2000Evaluation of small-angle scattering data of charged particles using the generalized indirect Fourier transformation techniquecitations
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article
Silicon Nitride Photonic Particle Detector-Experiments and Model Assessment
Abstract
<p>Sensors based on the interaction between analytes and the evanescent field of a silicon nitride waveguide are emerging in the field of bio-medical and environmental applications. We designed and implemented the first single particle detector based on this sensor principle that consists of a silicon nitride waveguide with sub-micron dimensions. The detection capabilities of the prototype were demonstrated with polystyrene latex (PSL) spheres equal to or greater than O200 nm. Single PSL spheres caused a decrease of the transmission through the waveguide from 0.2 up to 10%, depending on their diameter and position with respect to the waveguide. The experiments were supported by 3D finite element method (FEM) simulations of the particle-waveguide interaction. The simulated relative scattered power of a single sphere is in agreement with experimental results obtained from two different setups. The silicon nitride photonic chip was fabricated with a plasma-enhanced chemical vapor deposition (PECVD) process, which is compatible with established complementary metal-oxide-semiconductor (CMOS) processes for high-volume production. The demonstrator setup was realized with an external laser and photodetector, but with recent advances in light source and detector integration, our work leverages the realization of a fully integrated, low-cost photonic particle detector.</p>